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Application of molecular force for mass analysis of Krypton/Xenon mixture in low-pressure MEMS gas sensor

Barzegar Gerdroodbary, M ; Sharif University of Technology | 2018

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  1. Type of Document: Article
  2. DOI: 10.1016/j.vacuum.2017.12.042
  3. Publisher: Elsevier Ltd , 2018
  4. Abstract:
  5. Development of new techniques for detection and analysis of xenon/krypton mixtures is significant for both industrial and environmental purposes. In this research, direct simulation Monte Carlo is applied to analysis Xenon/Krypton gas mixtures through different molecular forces inside a new micro gas sensor (MIKRA). In this device, a temperature difference inside a rectangular enclosure with heat and cold arms as the non-isothermal walls induces a molecular force known as Knudsen force at low pressure condition. This force is proportional to the main characteristics of the gas mixture. In order to simulate a rarefied gas inside the micro gas detector, Boltzmann equations are applied to obtain high precision results. To solve these equations, Direct Simulation Monte Carlo (DSMC) approach is used as a robust method for the non-equilibrium flow field. In this research, the effect of various concentrations of the Xenon/Krypton gas mixtures on force generation is comprehensively studied. Our findings show that value of generated Knudsen force significantly different when the fraction of each component in Xenon/Krypton gas mixtures is varied. This indicates that this micro gas sensor could precisely detect the concentration of Xenon/Krypton gas mixtures in a low-pressure environment. In addition, the obtained results demonstrate that the mechanism of force generation highly varies in the different pressure conditions. © 2017 Elsevier Ltd
  6. Keywords:
  7. DSMC ; Knudsen molecular force ; Low-pressure gas actuators ; Non-equilibrium flow ; Xenon/Krypton gas mixtures ; Boltzmann equation ; Gas detectors ; Gas mixtures ; Krypton ; Monte carlo methods ; Xenon ; Direct simulation monte carlo ; Low pressure environment ; Low pressure gas ; Low-pressure conditions ; Molecular forces ; Non-equilibrium flows ; Temperature differences ; Gases
  8. Source: Vacuum ; Volume 150 , April , 2018 , Pages 207-215 ; 0042207X (ISSN)
  9. URL: https://www.sciencedirect.com/science/article/abs/pii/S0042207X17311855#!