Fabrication and Characterization of Patterned Carbon Nanotubes Network on the Silicon Wafer, by Plasma Enhanced Chemical Vapor Deposition, M.Sc. Thesis Sharif University of Technology ; Rashidian, Bijan (Supervisor)
Abstract
Carbon nanotubes, due to their extraordinary electronic and physical properties, have attracted much attention in the last decade. Some of their potential applications are in CNT-field effect transistor, field emission devices, physical and chemical sensors, micro and Nanoelectromechanical systems and Nano antenna. In this thesis, we have first reviewed some features of carbon nanotubes and the advantages of PECVD method compared with thermal CVD. In the second part the role of some of the materials (such as H2/NH3/C2H4) in CNT growth are studied. We created a square pattern on the silicon wafer by photolithography. Afterwards, titanium and nickel deposition is done on the mentioned pattern....
Cataloging briefFabrication and Characterization of Patterned Carbon Nanotubes Network on the Silicon Wafer, by Plasma Enhanced Chemical Vapor Deposition, M.Sc. Thesis Sharif University of Technology ; Rashidian, Bijan (Supervisor)
Abstract
Carbon nanotubes, due to their extraordinary electronic and physical properties, have attracted much attention in the last decade. Some of their potential applications are in CNT-field effect transistor, field emission devices, physical and chemical sensors, micro and Nanoelectromechanical systems and Nano antenna. In this thesis, we have first reviewed some features of carbon nanotubes and the advantages of PECVD method compared with thermal CVD. In the second part the role of some of the materials (such as H2/NH3/C2H4) in CNT growth are studied. We created a square pattern on the silicon wafer by photolithography. Afterwards, titanium and nickel deposition is done on the mentioned pattern....
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