Sharif Digital Repository

Microelectromechanical have wide application in mechanic, aerospace, medical, transport and information technology.
Due to large scale application and production, low costs and low energy consumption, these systems have been used in wide range of fields of engineering. Electrostatically actuated microbeams are extensively used as microelectromechanical systems (MEMS) such as microswitch and microresonator. The main component of electrically driven is microbeam. Microbeam acts as top surface of a capacitor with fixed bottom. The capacitance of capacitor changes due to the deflection of the microbeam. In this study static deflection of electrostatically actuated microbeam has been... 

Nowadays, micro systems are one of the most important scientific and industrial tools and become very important. Most of these systems are working based on deflection of a micro beam. As a result, studing performance of micro beams and controlling them have significant importance for science and engineering.Amoung micro beams cantilever and clamp-clamp beams, which are actuated by electrostatic or piezoelectric actuators, are very applicable. For example, micro cantilevers are used in Atomic Force Microscopy, Microswitches, acceleromiteres, and micro clamp-clamp beams are employed in micro mirrors and Grating Light Valves.In this research, a micro cantilever actuated with a piezoelectric... 

Systems that are electrostatically actuated have found a vast role in MEMS application. This technology is used in optical systems, sensors, micro switches, and deformable mirrors. Raising the use of these systems in fields that needs better performance highlighted the need to accurate study of dynamics and control of electrostatic actuated systems in micro scale. This work is dedicated to design of an estimation and control system for a micro-beam that is actuated by electrostatic. After a comprehensive survey on pervious works that are done on dynamic, applications, fabrication and control of these systems dynamic of the system is fully derived. The environmental factors like fringing... 

Nowadays, the usage of beam-shaped structures has widely spread in micro- and nano-electromechanical systems; consequently, scholars are extremely interested in precise modeling of static and dynamic behaviors of them. As the beams utilized in MEMS and NEMS structures have thicknesses in the order of microns and sub-microns, the experimentally validated small scale effects would be considerable in their behavior. In fact, experiments manifest that the size-dependent behavior is an intrinsic feature of materials when they are used in small-scale structures. In the classical continuum mechanics, there exists no material length scale parameter. Thus, the classical theory is unable to capture... 

In recent decades, the study of Nano and Micro Electromechanical Systems (NEMS and MEMS) as in micro sensors and actuators or in Atomic Force Microscopes (AFM) attracted considerable attention. Since an indispensable part of such systems is a nano or micro flexible beam, the inevitable undesirable vibrations of the flexible beam necessitate the implementation of vibration control strategies. Recently, some cutting edge experiments on statics and dynamics behavior of micro beams have been conducted that reveal some deviations from the prediction of classical theories, and hence this leads to development of strain gradient elasticity theory. In addition, the often-adopted finite dimensional... 

Nowadays, Microelectromechanical accelerometers are of the main parts of inertial navigation systems, and so it is essential to characterize and understand the parameters affecting their performance in order to design them in a way that enables them to survive different practical applications. Mechanical shock is one of the factors existing in almost every industrial environment and cause damages or even permanent failures in MEMS devices. Identifying these damages and protecting the microstructure against them seems inevitable for the designer and engineer of this field.
In general, approaches of protecting microstructures against mechanical shock are categorized into two major... 

In this research a microrobot constructed from three series connected microcantilever has been introduced and its behavior has been evaluated. Length of each microcantilever is about several hundred microns. Due to actuation of microrobot, piezoelectric has been employed. Considering one DOF of each microcantilever, this microrobot has three DOF. Manipulation and microscopy in nano and micron scale can be mentioned as main duties for this microrobot. In devices which are used for these purposes commonly parallel mechanisms are employed. Also in some devices such as AFM, samples are needed to be placed on platform. However in this study a serial mechanism has been employed which make this... 

Nowadays, micro systems in many area of science and technology have special importance and status. The main function of these systems is based on the deformation of a beam at micro scale. Therefore study of behavior and control of micro-beams will have a great importance. Among micro-beams, clamped-free and clamped-clamped micro beams that actuated by piezoelectric and electrostatic actuators have wider applications. For example, clamped-free micro-beams are used in atomic force microscopy (AFM), micro switches, mass sensors and micro-accelerometers and clamped-clamped micro-beams are used in micro mirrors and Grating Light Valves (GLV). In this thesis, the studied system is clamped-free... 

With regard to daily developments in micro and nanotechnology , the use of micro robots, In a different of applications increased extensively. The aim of this research was to introduce a mobile micro robot and analysis its behavior. this micro robot has several microlegs which are formed from microbeam mechanism and piezoelectric actuators. The degrees of freedom by taking any micro beam, any of these microlegs are able to move in a three-dimensional space. The mechanism used in this research for each of the microrobot legs, as was the consecutive series and its increase, in manor motor .In this research, unlike the previous tasks, piezoelectric actuators are considered as end effectors and... 

During the past decade, micromachining technology has become available to fabricate micron-sized mechanical parts. The miniaturization of almost all types of devices and systems is arguably a greater opportunity for commercial profit and beneficial technological advances (e.g., micromechanical, microfluidic, microthermal, micromagnetic, microoptical and microchemical). However, instead of the traditional evolutionary engineering effort to reduce size and power while simultaneously increasing the performance of such a diverse set of systems, the field of microelectromechanical systems (MEMS) represents an effort to radically transform the scale, performance and cost of these systems by... 

Recently, micro-electromechanical systems have absorbed much attention due to their many applications in various industries, such as actuators, sensors, microswitches, and so on. These systems usually consist of a cantilever beam or a fixed-fixed beam in micro scale which can change shape under electrical force. In sensors and electrical actuators, Microbeams are under so much vibration that they undergo distortion and fracture in a short period of time. One way to prevent such phenomena is to use materials that have high flexibility during use and have a longer life span. In order to achieve this, the selection of nanocomposite microbeams which incorporate light materials as the matrix... 

Due to the features like small dimensions, low manufacturing cost and low power consumption, micro-electromechanical systems (MEMS) are widely utilized in engineering applications. Many experimental investigations have indicated that the mechanical behavior of constructive microelements of these systems isn’t predictable by classical continuum theory. Therefore, to analyze the behavior of microelements, the non-classical continuum theories which can capture size effects should be utilized. On the other hand, various experimental observations have confirmed that thermoelastic damping (TED) is a dominant source of energy dissipation in microelements, in contrast to the non-small parts and... 

In this research, a viscoelastic microcantilever beam is analytically analyzed based on the modified strain gradient theory and the results are used in order to study micro pillar shear stress sensors. The abstract of this research can be divided to three sections:In the first section, applying Euler-Bernoulli inextensibility of the centerline condition via Hamilton’s principle, the nonlinear equation of motion and related boundary conditions are derived based on shortening effect theory and discretized by Galerkin method. Inner damping, nonlinear curvature effect, and nonlinear inertia terms are applied. First mode nonlinear frequency and time response of the viscoelastic microcantilever...