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Vibration Analysis of an Electrostatically Actuated Microbeam Using Homotopy Perturbation Method

Mojahedi, Mahdi | 2009

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 39195 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Ahmadiyan, Mohammad Taghi
  7. Abstract:
  8. Microelectromechanical have wide application in mechanic, aerospace, medical, transport and information technology.
    Due to large scale application and production, low costs and low energy consumption, these systems have been used in wide range of fields of engineering. Electrostatically actuated microbeams are extensively used as microelectromechanical systems (MEMS) such as microswitch and microresonator. The main component of electrically driven is microbeam. Microbeam acts as top surface of a capacitor with fixed bottom. The capacitance of capacitor changes due to the deflection of the microbeam. In this study static deflection of electrostatically actuated microbeam has been obtained and pull-in instability is investigated. Homotopy perturbation method and modified lindstedt-Poincare are utilized to find analytical expressions for natural frequencies of predeformed microbeam. Finally, response of microbeam actuated by AC voltage is investigated using by coupling method between Homotopy and multiple scale. In this project, analytical approach is implemented and closed form solutions are obtained. Results are in good agreement with literature and experimental finding in literature. by this method, pull-in instability can be predicted .
  9. Keywords:
  10. Pull-in Phenomenon ; Natural Frequency ; Galerkin Method ; Vibrational Analysis ; Microbeam ; Homotopy Perturbation ; Static Deflection

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