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Fabrication and Investigation of Silicon Based Nanostructures Surface Properties

Bashirpour, Mohammad | 2013

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 45253 (05)
  4. University: Sharif University of Technology
  5. Department: Electrical Engineering
  6. Advisor(s): Rashidian, Bijan
  7. Abstract:
  8. Nowadays, silicon based devices especially carbon nanotubes received lots of attentions and advancement from researchers and industries. Because of amazing electrical and mechanical properties and wide range of applications, CNTs are received a lot of attention from nanoelectronics experts. There are lots of CNT growth methods such as: Arc Discharge, Laser Ablation, Surface Decomposition, CVD and PECVD.
    In this thesis, we are going to use PECVD method to synthesis CNT. A typical PECVD system includes two parallel electrodes that have been packed in vacuum chamber and gases like argon, hydrogen and NH3 are introduced to chamber as a reactant gas.
    In this thesis, firs we had fixed MT lab PECVD system and after that we installed new equipment to this system to achieve our goal. We have use iron nitrate and isopropyl alcohol as a catalyst to growth iron nanoparticles. After that, hydrogen and ethylene gases are injected to the vacuum chamber to complete CNT growth process. AFM and SEM microscopy are used to characterize CNTs. The effect of RF power, temperature and iron nitrate solution on CNT growth has been investigated. According to the results, increasing temperature results in dense CNTs and RF power makes CNTs aligned and as we increase Iron nitrate density diameter and density of CNTs increases
  9. Keywords:
  10. Plasma ; Carbon Nanotubes ; Nanoparticles ; Catalyst ; Plasma Enhanced Chemical Vapor Deposition (PECVD)

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