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Dynamic and Vibration Analysis of Micro-Mirrors Made of FGM

Fakhary, Ahmad Reza | 2015

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 46853 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Ahmadiyan, Mohammad Taghi; Firoozbakhsh, Keikhosrow
  7. Abstract:
  8. The important role of MEMS devices in optical system has initiated the development of a new class of MEMS called Micro-Opto-Electro-Mechanical systems (MEOMS), which mainly includes micromirrors and torsional microactuators. These devices have found variety of application in optical switches, display, micro scanning mirrors, optical cross-connects interferometry, spectroscopy, aberration correction and biomedical imaging. In this project, the dynamic behavior of electrostatic micromirrors under the effect of intermolecular surface forces and squeezed film damping are studied. The prior art published in the literature have mainly used pure torsion models. In a pure torsion, just the torsion of supporting beams are considered in the formulations, while in practical situation, in addition to torsion, bending of the supporting beams come into play as well. In order to overcome these limitations, in this project a coupled two degree of freedom torsion-bending model has been used for modeling the micromirror’s behavior. Functionally graded materials are used to improve pull-in phenomenon in micromirror. First, in order to obtain the mechanical strain energy stored in the torsion beams made of FGM; the torsional and lateral stiffness should be calculated. Then the nonlinear vibration behavior of the mirror is modeled using the Lagrange equations and primary and secondary resonances are analyzed using the multiple time scale perturbation method. The results reveal that using FGM can increase pull-in voltage and improve pull-in phenomena in micromirrors
  9. Keywords:
  10. Electrostatic Actuation ; Nonlinear Vibration ; Functionally Graded Materials (FGM) ; Torsional Electrostatical Micromirror ; Micromirrors

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