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- Type of Document: M.Sc. Thesis
- Language: Farsi
- Document No: 47607 (08)
- University: Sharif University of Technology
- Department: Mechanical Engineering
- Advisor(s): Ahmadian, Mohammad Taghi; Firoozbakhsh, Keikhosrow
- Abstract:
- In this research a microrobot constructed from three series connected microcantilever has been introduced and its behavior has been evaluated. Length of each microcantilever is about several hundred microns. Due to actuation of microrobot, piezoelectric has been employed. Considering one DOF of each microcantilever, this microrobot has three DOF. Manipulation and microscopy in nano and micron scale can be mentioned as main duties for this microrobot. In devices which are used for these purposes commonly parallel mechanisms are employed. Also in some devices such as AFM, samples are needed to be placed on platform. However in this study a serial mechanism has been employed which make this microrbot more portable and make it easy to do some operation in spaces which can not be reached easily. On the other hand there would be no need to for samples displacement. At first step of this research kinematics and statics of the microrobot is been investigated. In invers kinematics analysis a work space with several microns has been obtained and statics analysis shows that for moving microrobot tip in the determined workspace, less than ten voltages is needed for piezoelectrics. In the following dynamics and vibrations of microrobot is been evaluated. Considering viscous air damping, structural damping, piezoelectric effect and external force on microrobot tip, equations of motion based on LaGrange method is been obtained and then vibrational parameters such as natural frequencies, mode shapes, damping ratio and so on are been calculated. Obtained results indicate that microrobots natural frequencies are about ten thousand hertz. Dynamics response of microrobt under piezoelectrics actuation and external force on the microrobot tip is been investigated and the effect of impulsive and linear piezoelectrics actuation is evaluated. Based on obtained vibrational parameters, microrobot modal analysis is been carried out and the effect of piezoelectrics actuation frequency on the microrobot amplitude vibration is been studied. In the last step based on dynamics equations, similar to atomic force microscope, microscopy process by this microrobot is been investigated. Results show that this microrobot is able to carry out a three dimensional microscopy process. In this study beside analytical equations, due to comparison FEM models have been employed too
- Keywords:
- Microbeam ; Piezoelectric ; Micro Robot ; Microelectromechanical Systems (MEMS) ; Microcantiliver Vibration
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