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A novel reciprocating micropump based on Lorentz force
Salari, A ; Sharif University of Technology | 2015
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- Type of Document: Article
- DOI: 10.1117/12.2078611
- Publisher: SPIE , 2015
- Abstract:
- Lorentz force is the pumping basis of many electromagnetic micropumps used in lab-on-a-chip. In this paper a novel reciprocating single-chamber micropump is proposed, in which the actuation technique is based on Lorentz force acting on an array of microwires attached on a membrane surface. An alternating current is applied through the microwires in the presence of a magnetic field. The resultant force causes the membrane to oscillate and pushes the fluid to flow through microchannel using a ball-valve. The pump chamber (3 mm depth) was fabricated on a Polymethylmethacrylate (PMMA) substrate using laser engraving technique. The chamber was covered by a 60 μm thick hyper-elastic latex rubber diaphragm. Two miniature permanent magnets capable of providing magnetic field of 0.09 T at the center of the diaphragm were mounted on each side of the chamber. Square wave electric current with low-frequencies was generated using a function generator. Cylindrical copper microwires (250 μ4m diameter and 5 mm length) were attached side-by-side on top surface of the diaphragm. Thin loosely attached wires were used as connectors to energize the electrodes. Due to large displacement length of the diaphragm (∼3 mm) a high efficiency (∼90%) ball valve (2 mm diameter stainless steel ball in a tapered tubing structure) was used in the pump outlet. The micropump exhibits a flow rate as high as 490μl/s and pressure up to 1.5 kPa showing that the pump is categorized among high-flow-rate mechanical micropumps
- Keywords:
- Flexible membrane ; Micropump ; Single chamber ; BioMEMS ; Diaphragms ; Flow rate ; Lorentz force ; Magnetic fields ; Microfluidics ; Microsystems ; Pumping (laser) ; Stainless steel ; Flexible membranes ; High-flow rate ; Micro pump ; Microwire ; PMMA ; reciprocating ; Single chambers ; Pumps
- Source: Progress in Biomedical Optics and Imaging - Proceedings of SPIE, 7 February 2015 through 9 February 2015 ; Volume 9320 , 2015 ; 16057422 (ISSN) ; 9781628414103 (ISBN)
- URL: http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2196013