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An investigation on the torsional sensitivity and resonant frequency of an AFM with sidewall and top-surface probes

Kahrobaiyan, M. H ; Sharif University of Technology | 2010

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  1. Type of Document: Article
  2. DOI: 10.1115/DETC2010-28637
  3. Publisher: 2010
  4. Abstract:
  5. The resonant frequencies and torsional sensitivities of an atomic force microscope (AFM) with assembled cantilever probe (ACP) are studied. This ACP comprises a horizontal cantilever, a vertical extension and two tips located at the free ends of the cantilever and the extension which makes the AFM capable of simultaneous topography at top-surface and sidewalls of microstructures especially microgears which consequently leads to a time-saving swift scanning process. In this work, the effects of the sample surface contact stiffness and the geometrical parameters such as the ratio of the vertical extension length to the horizontal cantilever length and the distance of the vertical extension from clamped end of the horizontal cantilever on torsional resonant frequencies and sensitivities are assessed. These geometrical effects are illustrated in some figures. The results show that the low-order vibration modes are more sensitive for low values of the contact stiffness but the situation is reversed for high values. Copyright
  6. Keywords:
  7. AFM ; Atomic force microscopes ; Cantilever probe ; Contact stiffness ; Free end ; Geometrical effect ; Geometrical parameters ; Microgears ; Sample surface ; Vertical extension ; Vibration modes ; Design ; Nanocantilevers ; Natural frequencies ; Probes ; Stiffness ; Surface topography ; Atomic force microscopy
  8. Source: ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2010, Montreal, QC, 15 August 2010 through 18 August 2010 ; Volume 4 , 2010 , Pages 589-599 ; 9780791844120 (ISBN)
  9. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1612185