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Torsional sensitivity of the first four modes of an AFM cantilever with a sidewall probe using analytical method

Kahrobaiyan, M. H ; Sharif University of Technology | 2010

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  1. Type of Document: Article
  2. DOI: 10.1115/DETC2009-87035
  3. Publisher: 2010
  4. Abstract:
  5. In this study, using analytical method, the torsional resonant frequency and torsional sensitivity of the first four modes of an AFM cantilever with sidewall probe including a horizontal cantilever and a vertical extension is analyzed and a closed form for torsional sensitivity of the probe is derived. In addition, the effect of relative parameters such as ratio of vertical extension length to horizontal cantilever length is investigated. According to this study, the results show that as contact stiffness increases, the resonant frequencies of all vibration modes increases until they reach constant values at very high values of contact stiffness. It is also can be found that low-order modes are more sensitive than high-order one. When contact stiffness increases, the torsional sensitivities of all vibration modes decrease and the graphs converge at very high values of contact stiffness. In addition, enhancement of ratio of vertical extension length to cantilever length decreases the resonant frequency of mode 1 for all values of the contact stiffness and decreases torsional sensitivity for low values of the contact stiffness. But for high values of contact stiffness, there is a peak for torsional sensitivity. Finally the result shows that increase of the tip mass, decreases the torsional sensitivity with a light slope
  6. Keywords:
  7. AFM cantilevers ; Analytical method ; Closed form ; Contact stiffness ; High-order ; Resonant frequencies ; Sensitivity of the probe ; Tip mass ; Vertical extension ; Vibration modes ; Atomic force microscopy ; Nanocantilevers ; Natural frequencies ; Probes ; Vibrating conveyors ; Stiffness
  8. Source: Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009, 30 August 2009 through 2 September 2009, San Diego, CA ; Volume 6 , August-September , 2010 , Pages 617-622 ; 9780791849033 (ISBN)
  9. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1650188