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Design of a Micromixer based on Cantilever Beam Displacement due to Piezoelectric Laminars

Delavar, Siavash | 2017

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 49770 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Ahmadian, Mohammad Taghi; Asghari, Mohsen
  7. Abstract:
  8. During the past decade, micromachining technology has become available to fabricate micron-sized mechanical parts. The miniaturization of almost all types of devices and systems is arguably a greater opportunity for commercial profit and beneficial technological advances (e.g., micromechanical, microfluidic, microthermal, micromagnetic, microoptical and microchemical). However, instead of the traditional evolutionary engineering effort to reduce size and power while simultaneously increasing the performance of such a diverse set of systems, the field of microelectromechanical systems (MEMS) represents an effort to radically transform the scale, performance and cost of these systems by employing batch-fabrication techniques. MEMS technology has enabled many types of sensor, actuator and system to be reduced in size by orders of magnitude. This research presents a novel design of a micro-robot that has 2 flexible links and also a rigid link with a length of one-tenth of the first two links. Each link consists of an elastic layer and two piezoelectric layers on the sides. Micro-robot structure is monolithic and Links are connected to each other with no conventional or flexible joints. By using static analysis of links through a multilayer piezoelectric beam model and then kinematic analysis of micro-robot, static analysis of micro-robot can be achieved. Also by utilizing energy methods, equations of motion of the system has been derived. By using equations of motion, Natural frequencies and mode shapes has been calculated and the results have been compared with FEM model. After that dynamic behavior of micromixer has been analyzed and Also vibrational response of system under piezoelectric actuation and external forces has been studied.
  9. Keywords:
  10. Micro Robot ; Microbeam ; Cantilever Beam ; Piezoelectric Materials ; Static Analysis ; Microelectromechanical Systems (MEMS) ; Kinematics

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