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Multifractal and optical bandgap characterization of Ta2O5 thin films deposited by electron gun method

Shakoury, R ; Sharif University of Technology | 2020

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  1. Type of Document: Article
  2. DOI: 10.1007/s11082-019-2173-5
  3. Publisher: Springer , 2020
  4. Abstract:
  5. The micromorphology of tantalum pentoxide (Ta2O5) thin films, deposited on glass substrates by electron gun method, has been analyzed using atomic force microscopy (AFM), UV–Vis–NIR spectrophotometry and multifractal analyses. Two samples were grown at basic pressure of 7 × 10−6 mbar, work pressures of 1.3 × 10−4 and 2.0 × 10−4 mbar, and thicknesses of 0.38 μm and 0.39 μm, respectively. Subsequently, these samples were annealed at 300 °C for 2 h. The physical, structural and optical analyses were investigated by spectroscopic ellipsometry, spectrophotometry and AFM. The measured transmittance spectra were studied based on the Swanepoel method, whose results also yielded to the estimation of the film thickness and the refractive index. Finally, Ta2O5 thin films were characterized by AFM measurements and multifractal analyses for an accurate description of the 3-D surface microtexture features. The fractal examinations of the samples revealed that these microstructures exhibit multifractal characteristics. Essential parameters that characterized the thin films were compared and discussed thoroughly. © 2020, Springer Science+Business Media, LLC, part of Springer Nature
  6. Keywords:
  7. Atomic force microscopy ; Electron gun method ; Multifractal analysis ; Atomic force microscopy ; Electron guns ; Fractals ; Optical properties ; Refractive index ; Spectrophotometry ; Spectroscopic ellipsometry ; Substrates ; Tantalum oxides ; Micromorphologies ; Multifractal analysis ; Multifractal characteristics ; Optical analysis ; Surface microtexture ; Ta2O5 thin films ; Tantalum pentoxide ; Transmittance spectra ; Thin films
  8. Source: Optical and Quantum Electronics ; Volume 52, Issue 2 , 2020
  9. URL: https://www.springerprofessional.de/en/multifractal-and-optical-bandgap-characterization-of-ta2o5-thin-/17643378