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Designing and Manufacturing of a Micropositioning Setup for Solid-State Micropore Fabrication

Gholami, Mohammad Mahdi | 2025

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 57996 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Akbari, Javad; Taghipour, Mojtaba
  7. Abstract:
  8. In the present era, the importance of particle recognition and analysis in human life is undeniable. Among the various particle identification methods, the resistive pulse method has attracted special attention due to its ability to quickly and instantaneously examine individual particles at an affordable cost. This method requires a resistive pulse sensor, of which the micropore is one of its vital components. The aim of this research is to present an innovative approach to the design and manufacture of a solid-state micropore manufacturing device. This new approach seeks to replicate the micropore manufacturing, improve efficiency by improving the manufacturing process time and, if possible, reduce operational challenges compared to existing methods. The micropores produced by this method will be made of solid-state materials, with an orientation perpendicular to the plane and a diameter of less than 10 microns. The proposed method for manufacturing micropores consists of two main parts: first, the design of precise positioning systems that combine a small bimetallic actuator in the upper part and a stepper motor system in the lower part of the device. Second, the micro-pore creation mechanism, which is based on the hot embossing process. The device made with this method was able to create numerous micro-pores with a diameter of less than 10 microns. This device does not have a good repeatability in the diameter, shape, and thickness of the produced micro-pores. However, the duration of the micro-pore creation process with this device is between 6 and 10 minutes, which is an achievement and progress in the creation of micropores
  9. Keywords:
  10. Micropore Fabrication ; Hot-Embossing ; Bimetallic Actuator ; Solid State Micropore ; Manufacturing ; Precise Positioning

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