Design and Simulation (& Manufacturing) of A Micro-Gyroscope

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Soltani, Arman | 2009

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Type of Document: M.Sc. Thesis
Language: Farsi
Document No: 39516 (08)
University: Sharif University of Technology
Department: Mechanical Engineering
Advisor(s): Akbari, Javad
Abstract:
Nowadays, microgyroscopes are among the most important products of MEMS. The production of small, precise and inexpensive gyroscopes has become possible as the result of recent developments in fabrication technology. In this thesis it is intended to introduce a new method for manufacturing more precise microgyroscopes regarding manufacture facilities. Using this new method, sensitivity and resistance of microgyroscopes are increased against noises which are primarily caused by vibration and rotation about undesirable axes. The rotational movement imposed on the gyro is detected through fluid flow within its torus channel. This transformation facilitates the measurement of the initial motion. Decreasing the number of moving parts has been an important point of concern. In addition to decreasing manufacturing problems associated with moving parts, this would help rendering noises during operation. First a novel method is developed for measuring angular acceleration. Design features, simulation and manufacturing methods are presented afterwards.
Keywords:
Microelectromechanical Systems (MEMS) ; Ultrasonic Waves ; Microfluidic Devices ; Simulation ; Design ; Microgyroscope

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