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Effect of microbeam electrical resistivity on vibration frequency shift of an electrostatically actuated microbeam

Pasharavesh, A ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.1115/DETC2010-28430
  3. Abstract:
  4. Nonlinear vibration of a microbeam actuated by a suddenly applied voltage with considering the effect of voltage distribution on the beam due to electrical resistivity of beam is investigated. Homotopy perturbation method is implemented to solve the coupled nonlinear partial differential equations of motion. The vibration frequency variation and damping at various resistivities is studied. Considering resistivity, effect of applied voltage and beam length on the frequency shift and damping ratio is analyzed. Findings indicate there exists a jump in frequency shift and damping ratio at a critical resistivity. Variation of critical resistivity with respect to modulus of elasticity and beam density is also studied. Results show the jump in frequency shift and damping ratio can be controlled with proper selection of modulus of elasticity and density of beam
  5. Keywords:
  6. Applied voltages ; Beam density ; Beam length ; Damping ratio ; Electrical resistivity ; Frequency shift ; Homotopy perturbation method ; Micro beams ; Non-linear vibrations ; Nonlinear partial differential equations ; Vibration frequency ; Voltage distribution ; Damping ; Design ; Elastic moduli ; Electric conductivity ; Electrostatic actuators ; Equations of motion ; Nonlinear equations ; Partial differential equations ; Perturbation techniques ; Frequency shift keying
  7. Source: Proceedings of the ASME Design Engineering Technical Conference, 15 August 2010 through 18 August 2010 ; Volume 4 , 2010 , Pages 547-554 ; 9780791844120 (ISBN)
  8. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1612173