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On the primary resonance of an electrostatically actuated MEMS using the homotopy perturbation method

Mojahedi, M ; Sharif University of Technology | 2010

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  1. Type of Document: Article
  2. DOI: 10.1115/DETC2009-86623
  3. Publisher: 2010
  4. Abstract:
  5. In this paper, primary resonance of a double-clamped microbeam has been investigated. The Microbeam is predeformed by a DC electrostatic force and then driven to vibrate by an AC harmonic electrostatic force. Effects of midplane stretching, axial loads and damping are considered in modeling. Galerkin's approximation is utilized to convert the nonlinear partial differential equation of motion to a nonlinear ordinary differential equation. Afterward, a combination of homotopy perturbation method and the method of multiple scales are utilized to find analytic solutions to the steady-state motion of the microbeam, far from pull-in. The effects of different design parameters on dynamic behavior are discussed. The results obtained by the presented method are validated by comparing with literature
  6. Keywords:
  7. MEMS ; AC harmonics ; Analytic solution ; Design parameters ; Galerkin's approximation ; Method of multiple scale ; Micro beams ; Nonlinear ordinary differential equation ; Nonlinear partial differential equations ; ON dynamics ; Predeformed ; Primary resonance ; Pull-in ; Circuit resonance ; Design ; Electric furnaces ; Electrostatic actuators ; Electrostatic force ; Equations of motion ; Nonlinear equations ; Ordinary differential equations ; Partial differential equations ; Perturbation techniques
  8. Source: Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009, 30 August 2009 through 2 September 2009 ; Volume 6 , September , 2010 , Pages 569-574 ; 9780791849033 (ISBN)
  9. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1650181