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Hot filament CVD of Fe-Cr catalyst for thermal CVD carbon nanotube growth from liquid petroleum gas

Akbarzadeh Pasha, M ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.1016/j.apsusc.2009.08.090
  3. Abstract:
  4. A hot filament chemical vapor deposition (HFCVD) method was used to prepare Fe-Cr thin film on Si substrate. The produced layers were used as catalysts for growing carbon nanotubes (CNTs) from liquid petroleum gas (LPG) at 825 °C by thermal CVD (TCVD) method. To characterize the obtained catalysts or CNTs, X-ray Photoelectron Spectroscopy (XPS), Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) and Raman spectroscopy were used. CNTs were grown on HFCVD derived Fe-Cr catalyst with the LPG as carbon source successfully. It was found that an annealing process on catalysts enhances the surface concentration of Cr atoms and reduces the sizes of catalyst particles. The grown CNTs on annealed sample were morphologically denser with smaller diameters compared to the as deposited one. In addition, the effect of filament temperature on CNTs was investigated. By increasing the filament temperature from 850 to 1050 °C the surface density and diameters of CNTs were improved
  5. Keywords:
  6. HFCVD ; TCVD ; Annealed samples ; Annealing process ; Carbon nanotube growth ; Carbon source ; Catalyst particles ; Cr atoms ; Filament temperature ; Hot filament CVD ; Hot-filament chemical vapor deposition ; Liquid-petroleum gas ; Metal catalyst ; SEM ; Si substrates ; Surface concentration ; Surface density ; TEM ; Thermal CVD ; Auger electron spectroscopy ; Catalysis ; Catalysts ; Chemical vapor deposition ; Chromium ; Deposition ; Filaments (lamp) ; Liquids ; Raman spectroscopy ; Scanning electron microscopy ; Semiconducting silicon compounds ; Thermal effects ; Transmission electron microscopy ; X ray photoelectron spectroscopy ; Carbon nanotubes
  7. Source: Applied Surface Science ; Volume 256, Issue 5 , 2009 , Pages 1365-1371 ; 01694332 (ISSN)
  8. URL: http://www.sciencedirect.com/science/article/pii/S0169433209012379#!