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Effect of squeeze-film damping on the dynamic behavior of circular and rectangular microplates

Tajalli, A ; Sharif University of Technology | 2007

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  1. Type of Document: Article
  2. DOI: 10.1109/ISDRS.2007.4422309
  3. Publisher: 2007
  4. Keywords:
  5. Damping ; Nonlinear equations ; Microelectromechanical devices ; Electrostatics ; Voltage ; Paper technology ; Mechanical engineering ; Educational institutions ; Electrodes ; Microstructure
  6. Source: 2007 International Semiconductor Device Research Symposium, ISDRS, College Park, MD, 12 December 2007 through 14 December 2007 ; January , 2007 ; 1424418917 (ISBN); 9781424418916 (ISBN)
  7. URL: https://ieeexplore.ieee.org/document/4422309