Loading...

Fabrication and Theoretical Investigation of a Single Bubble Nozzle-Diffuser Micropump

Pirouzpanah, Sahand | 2009

695 Viewed
  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 39143 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Saeedi, Mohammad Hassan; Saeedi, Mohammad Saeed
  7. Abstract:
  8. The potential of phase change process in liquids at microscale has been a favorite for the scientists to fabricate this type of micropumps. To hold unidirectional flow in microchannels usually nozzle-diffuser arrangement is used. Due to the existence of difference in pressure drop in the nozzle and diffuser sections, one can see unidirectional flow through diffuser direction. The objective of this article is to analyze analytically the thermo-hydrodynamic behavior of the Isopropyl Alcohol (IPA) bubble of a phase change micropump. Considering the simultaneous effects of hydrodynamic and thermal characteristics of the bubble in the bubble generation chamber, and temperature-saturation pressure relation of the IPA bubble based on Clausius-Clapeyron equation, the dynamics of the embedded bubble has been modeled. Using the results, a new model for pressure profile of bubble can be introduced. Applying this pressure profile in hydrodynamic analysis, the flow rate of the micropump for several cycles of operation has been attained. The obtained theoretical values for the micropump flow rate show good agreement with the corresponding existing experimental data. Then, analytical results are used in the fabrication of micropump. Primary tests show appropriate operation of the fabricated micropump
  9. Keywords:
  10. Microelectromechanical Systems (MEMS) ; Micropumps ; Bubble Dynamic ; Analytical Method ; Nozzle Difusser

 Digital Object List

 Bookmark

No TOC