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Positioning, Tracking and Shape Control in Micro-beams Via Piezoelectric Actuators

Jahromi Shirazi, Masoud | 2011

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 41688 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Alasti, Aria; Salarieh, Hassan
  7. Abstract:
  8. Nowadays, micro systems are one of the most important scientific and industrial tools and become very important. Most of these systems are working based on deflection of a micro beam. As a result, studing performance of micro beams and controlling them have significant importance for science and engineering.Amoung micro beams cantilever and clamp-clamp beams, which are actuated by electrostatic or piezoelectric actuators, are very applicable. For example, micro cantilevers are used in Atomic Force Microscopy, Microswitches, acceleromiteres, and micro clamp-clamp beams are employed in micro mirrors and Grating Light Valves.In this research, a micro cantilever actuated with a piezoelectric layer is considered. Modeling of the system of beam and piezoelectric is done using Hamilton's principle based on Timoshenko model of beam, and the resulted partial differential equations are projected to a system of ordinary differential equations using Galerkin projection method. After modeling the system, stability of the internal dynamics of the system is improved by means of a stabilizer and by aid of an input-output controller, position and tracking control problem of beam is solved. Finally, the static shape control of beam is considered.
  9. Keywords:
  10. Microbeam ; Piezoelectric Actuator ; Position Control ; Tracking Control ; Shape Control

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