Design of Monitoring and Control System for Ion Implanter Gases

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Baharian, Hossein | 2021

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Type of Document: M.Sc. Thesis
Language: Farsi
Document No: 54113 (05)
University: Sharif University of Technology
Department: Electrical Engineering
Advisor(s): Rashidian, Bijan
Abstract:
Very dangerous gases are used in ion implanter machines. Opening and closing the valves of these gases can be very dangerous. In this project, these valves are inspected, monitored and opened and closed from a safe distance. To do this, we must monitor and control the above system by using the latest and most efficient technologies available and with the least delay. For accurate and precise monitoring, clear images should be obtained from the location and changes should be detected, and the device can be controlled very quickly with the necessary commands. To do this, one must have an accurate and comprehensive knowledge of processors and communication protocols, and also pay attention to other criteria such as power consumption, cost, reliability. For this purpose, communication protocols, processors and the structure of visual sensors or cameras are thoroughly and comprehensively studied, and finally the desired system is implemented based on Raspberry Pi, Minized, STM32F746 boards and with appropriate communication channels. The advantages and disadvantages of each approach are described in detail
Keywords:
Cameras ; Internet of Things ; Visual Sensors ; Wireless Communication ; Processors ; Ion Implantation ; Field Programmable Gate Array (FPGA)

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