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Modeling and analytical solution of hybrid thermopiezoelectric micro actuator and performance study under changing of different parameters

Pourrostami, H ; Sharif University of Technology | 2015

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  1. Type of Document: Article
  2. DOI: 10.1080/15376494.2012.736060
  3. Publisher: Taylor and Francis Inc , 2015
  4. Abstract:
  5. Micro actuators are an irreplaceable part of motion control in miniaturized systems and are intended to have a high range of deformation, high accuracy, large force, and quick response. In this article, an analytical model for a hybrid thermopiezoelectric micro actuator is developed in which a double lead-zirconnate-titanate piezoceramic (PZT) beam structure consisting of two arms with different lengths are used. Governing differential equation of motion and electrical field are derived and solved. Out of parametric studies it was observed that, under application of temperature and voltage gradients, the deflection of the actuator shows different trends depending on the geometry of the micro actuator and also type of PZT material
  6. Keywords:
  7. Deflection ; Thermo piezoelectric ; Analytical models ; Deflection (structures) ; Differential equations ; Equations of motion ; Microactuators ; Microoptics ; Piezoelectric ceramics ; Electrical field ; Governing differential equations ; Hybrid ; Miniaturized systems ; Parametric study ; Performance study ; Voltage gradient ; Actuators
  8. Source: Mechanics of Advanced Materials and Structures ; Volume 22, Issue 10 , Mar , 2015 , Pages 785-793 ; 15376494 (ISSN)
  9. URL: http://www.tandfonline.com/doi/full/10.1080/15376494.2012.736060