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Dynamic analysis of electrically actuated rectangular microplates with nonlinear plate theory under squeeze-film damping effect

Tajalli, A ; Sharif University of Technology | 2009

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  1. Type of Document: Article
  2. DOI: 10.1115/IMECE2008-67034
  3. Publisher: 2009
  4. Abstract:
  5. In this paper, dynamic behavior and pull-in phenomenon of electrically actuated rectangular micro plates under the effect of squeeze-film damping and nonlinear electrostatic force is studied. Finite element method is implemented in order to drive weak formulations of linear and nonlinear micro plate equations of motion based on classical plate theory (CPT) (for thin microplates with moderate nonlinearity) and squeeze-film damping based on Reynolds nonlinear equation. Finally, an efficient reduced-order model contingent on singular value decomposition method (SVD) is used to study dynamic pull-in phenomenon. This model is constructed by the global basis functions achieved from a few runs of FEM and can reduce simulation time. Validating the macro model results with full FEM simulation shows that this model is effective. Copyright © 2008 by ASME
  6. Keywords:
  7. Classical plate theory ; Dynamic behaviors ; FEM simulations ; Global basis functions ; Macro model ; Microplates ; Non-linearity ; Nonlinear plate theory ; Plate equations ; Pull-in ; Reduced order models ; Reynolds ; Simulation time ; Singular value decomposition method ; Squeeze-film damping ; Weak formulation ; Control nonlinearities ; Damping ; Dynamic analysis ; Dynamics ; Equations of motion ; Finite element method ; Mechanical engineering ; Simulators ; Singular value decomposition ; Computer simulation ; Dynamic mechanical analysis ; Manufacture ; Nonlinear equations
  8. Source: 2008 ASME International Mechanical Engineering Congress and Exposition, IMECE 2008, Boston, MA, 31 October 2008 through 6 November 2008 ; Volume 13, Issue PART A , 2009 , Pages 401-408 ; 9780791848746 (ISBN)
  9. URL: https://asmedigitalcollection.asme.org/IMECE/proceedings-abstract/IMECE2008/48746/401/339167