Loading...

The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method

Shakoury, R ; Sharif University of Technology | 2021

330 Viewed
  1. Type of Document: Article
  2. DOI: 10.1007/s11082-021-03079-4
  3. Publisher: Springer , 2021
  4. Abstract:
  5. In this study, ZrO2 coatings with different thicknesses were grown by the electron beam evaporation technique. The crystalline structure was studied by XRD analysis which suggested the tetragonal and monoclinic phases for ZrO2 coatings. Additionally, the film thickness slightly enhanced the crystallinity. The surface morphology and fractal features were analyzed using Scanning Electron Microscopy (SEM). The surface statistical parameters and the fractal geometry were employed to analyze the impact of the coating thickness and homogeneity on the morphology of the films. The statistical processing and fractal dimension revealed variations in the morphology parameters due to the electron beam evaporation method applied for different thicknesses of samples. Based on these results, it can be concluded that the surface microtexture and fractal dimension area correlated with the thickness and homogeneity of the crystalline structure. © 2021, The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature
  6. Keywords:
  7. Coatings ; Crystallinity ; Electron beams ; Electrons ; Evaporation ; Fractal dimension ; Physical vapor deposition ; Scanning electron microscopy ; Surface morphology ; Thickness measurement ; Thin films ; Zirconia ; Crystalline structure ; Electron beam evaporation ; Electron beam evaporation methods ; Monoclinic phasis ; Morphology parameters ; Statistical parameters ; Statistical processing ; Surface microtexture ; Morphology
  8. Source: Optical and Quantum Electronics ; Volume 53, Issue 8 , 2021 ; 03068919 (ISSN)
  9. URL: https://link.springer.com/article/10.1007/s11082-021-03079-4?noAccess=true