Micro resonator nonlinear dynamics considering intrinsic properties

Sayyaadi, H ; Sharif University of Technology | 2009

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  1. Type of Document: Article
  2. Publisher: 2009
  3. Abstract:
  4. One of the most important phenomena to affect the motion behaviour of Micro Resonators is their thermal dependency. This has recently received the attention of researchers widely. A thermal phenomenon has two main effects, the first is damping, due to internal friction, and the second is softening, due to Young's modulus-temperature relationship. In this research work, some theoretical and experimental reported results are used to make a proper model, including thermal phenomena. Two Lorentzian functions are used to describe the restoring and damping forces caused by thermal phenomena. In order to emphasize the thermal effects, a nonlinear model of the MEMS, considering capacitor nonlinearity and mid-plane stretching, has been used. The responses of the system are developed by employing a multiple time scale perturbation method on a non-dimensionalized form of the equations. Frequency response, resonance frequency and peak amplitude are examined by varying the dynamic parameters of the modelled system. Finally, Fuzzy Generalized Cell Mapping (FGCM) is introduced and applied to the Micro Resonator's dynamical system behaviour. It is then concluded as to how the model uncertainties and different initial conditions can affect the working domain of the system and/or make it pull in instabilities. At the end, it can be seen that FGCM is a useful method for monitoring the working regions of Micro Resonators, while varying system parameters. © Sharif University of Technology, April 2009
  5. Keywords:
  6. Fuzzy ; Thermal effects ; A-thermal ; Cell mapping ; Damping forces ; Dynamic parameters ; Initial conditions ; Intrinsic property ; Lorentzian functions ; Main effect ; Micro resonator ; Micro resonators ; Model uncertainties ; Multiple time scale ; Non-linear model ; Non-Linearity ; Nonlinear dynamics ; Peak amplitude ; Perturbation method ; Proper models ; Pull-in instability ; Resonance frequencies ; Thermal phenomena ; Young's Modulus ; Damping ; Dynamic response ; Dynamical systems ; Dynamics ; Equations of motion ; Microelectromechanical devices ; Perturbation techniques ; Resonators ; Uncertainty analysis ; Frequency response ; Fuzzy mathematics ; Micromechanics ; Numerical model ; Parameterization ; Resonance ; Temperature effect ; Young modulus
  7. Source: Scientia Iranica ; Volume 16, Issue 2 B , 2009 , Pages 121-129 ; 10263098 (ISSN)
  8. URL: http://scientiairanica.sharif.edu/article_3006.html