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The effects of thickness on magnetic properties of FeCuNbSiB sputtered thin films

Shivaee, H. A ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.24200/sci.2017.4429
  3. Abstract:
  4. Thin films of Fe73.1Cu1Nb3.1Si14.7B8.2 alloy with 200, 500, and 800 nm thicknesses have been deposited by RF sputtering. Their magnetic properties have been characterized using Alternating Gradient Field Magnetometer (AGFM) and Vibrating Sample Magnetometer (VSM). The effects of residual stresses investigated by nanoindentation experiments were conducted on the as-deposited samples. It is observed that the coercivity of as-deposited films is inversely proportional to the thickness in relation with the residual stress induced during sputtering. © 2017 Sharif University of Technology. All rights reserved
  5. Keywords:
  6. Copper compounds ; Iron compounds ; Magnetic properties ; Magnetism ; Magnetometers ; Nanoindentation ; Niobium compounds ; Residual stresses ; Silicon compounds ; Sputtering ; Thin films ; As-deposited films ; Effects of thickness ; Gradient fields ; Ion sputtering ; Nanoindentation experiments ; Rf-sputtering ; Sputtered thin films ; Vibrating sample magnetometer ; Boron compounds ; Boron ; Copper ; Experiment ; Film ; Instrumentation ; Iron ; Magnetic property ; Niobium ; Silicon
  7. Source: Scientia Iranica ; Volume 24, Issue 6 , 2017 , Pages 3521-3525 ; 10263098 (ISSN)
  8. URL: http://scientiairanica.sharif.edu/article_4429.html