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Design, modeling and optimization of a piezoelectric pressure sensor based on thin-film PZT diaphragm contain of nanocrystalline powders

Mohammadi, V ; Sharif University of Technology | 2009

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  1. Type of Document: Article
  2. DOI: 10.1109/ISMA.2009.5164786
  3. Publisher: 2009
  4. Abstract:
  5. In this paper fabrication of a 0-3 ceramic/ceramic composite lead zirconate titanate, Pb(Zr0.52Ti0.48)O3 thin film has been presented and then a pressure sensor based on multilayer thin-film PZT diaphragm contain of Lead Zirconate Titanate nanocrystalline powders was designed, modeled and optimized. This multilayer diaphragm in general acts as sensor or actuator. ANSYS was used for simulation of diaphragm. Dynamics characteristics of this multilayer diaphragm have been investigated. By this simulation the effective parameters of the multilayer PZT diaphragm for improving the performance of a pressure sensor in different ranges of pressure are optimized. The optimized thickness ratio of PZT layer to SiO2 was given in the paper to obtain the maximum deflection of the multilayer thin-film PZT diaphragm. A 0-3 ceramic/ceramic composite lead zirconate titanate, Pb(Zr0.52Ti0.48)O3 film has been developed to fabricate the pressure sensor by a hybrid sol gel process. PZT nanopowders fabricated via conventional sol gel method and uniformly dispersed in PZT precursor solution by an attrition mill. Preparing of precursor started from 2-methoxyethanol as a solvent and acetylacetone (acac) as a chelating agent. The resulting composite solution deposited onto platinized silicon by spin coating, pyrolysis at 380°C and annealed at 650°C for 30 minutes, respectively.XRD analysis shows that perovskite structure would be formed due to the presence of a significant amount of ceramic nanopowders. This texture has a good effect on piezoelectric properties of perovskite structure. The film forms a strongly bonded network and less shrinkage occurs, so the films do not crack during process. Also the aspect ratio through this process would be increased. SEM micrographs indicated that PZT films were uniform, crack free and have a composite microstructure. © 2009 IEEE
  6. Keywords:
  7. 2-Methoxyethanol ; Acetylacetone ; Attrition mills ; Bonded networks ; Ceramic nanopowders ; Chelating agent ; Composite microstructures ; Crack free ; Dynamics characteristic ; Effective parameters ; Hybrid sol-gel ; Lead zirconate titanate ; Maximum deflection ; Modeling and optimization ; Nano powders ; Perovskite structures ; Piezoelectric pressure sensors ; Piezoelectric property ; Platinized silicon ; Precursor solutions ; PZT ; PZT film ; PZT layer ; SEM micrographs ; Sol-gel methods ; Thickness ratio ; Acetone ; Aspect ratio ; Chelation ; Composite films ; Cracks ; Diaphragms ; Film preparation ; Gels ; Lead ; Mechatronics ; Multilayers ; Nanocrystalline powders ; Nanostructured materials ; Optimization ; Oxide minerals ; Perovskite ; Piezoelectric actuators ; Piezoelectric materials ; Piezoelectric transducers ; Piezoelectricity ; Powders ; Pressure sensors ; Pressure transducers ; Silicon compounds ; Silicon oxides ; Sols ; Thin film devices ; Zirconium ; Semiconducting lead compounds
  8. Source: 2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009, Sharjah, 23 March 2009 through 26 March 2009 ; 2009 ; 9781424434817 (ISBN)
  9. URL: https://ieeexplore.ieee.org/document/5164786